diff --git a/.size-limit.js b/.size-limit.js
index 739c3f62aae1..b01242b3ffb2 100644
--- a/.size-limit.js
+++ b/.size-limit.js
@@ -2,28 +2,28 @@ module.exports = [
   // Main browser webpack builds
   {
     name: '@sentry/browser (incl. Tracing, Replay, Feedback) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, Replay, browserTracingIntegration, Feedback }',
     gzip: true,
     limit: '90 KB',
   },
   {
     name: '@sentry/browser (incl. Tracing, Replay) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, Replay, browserTracingIntegration }',
     gzip: true,
     limit: '75 KB',
   },
   {
     name: '@sentry/browser (incl. Tracing, Replay with Canvas) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, Replay, browserTracingIntegration, ReplayCanvas }',
     gzip: true,
     limit: '90 KB',
   },
   {
     name: '@sentry/browser (incl. Tracing, Replay) - Webpack with treeshaking flags (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, Replay, browserTracingIntegration }',
     gzip: true,
     limit: '75 KB',
@@ -42,35 +42,35 @@ module.exports = [
   },
   {
     name: '@sentry/browser (incl. Tracing) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, browserTracingIntegration }',
     gzip: true,
     limit: '35 KB',
   },
   {
     name: '@sentry/browser (incl. browserTracingIntegration) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, browserTracingIntegration }',
     gzip: true,
     limit: '35 KB',
   },
   {
     name: '@sentry/browser (incl. Feedback) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, Feedback }',
     gzip: true,
     limit: '50 KB',
   },
   {
     name: '@sentry/browser (incl. sendFeedback) - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init, sendFeedback }',
     gzip: true,
     limit: '50 KB',
   },
   {
     name: '@sentry/browser - Webpack (gzipped)',
-    path: 'packages/browser/build/npm/esm/index.js',
+    path: 'packages/browser/build/npm/esm/index.mjs',
     import: '{ init }',
     gzip: true,
     limit: '28 KB',
@@ -137,37 +137,43 @@ module.exports = [
   // React
   {
     name: '@sentry/react (incl. Tracing, Replay) - Webpack (gzipped)',
-    path: 'packages/react/build/esm/index.js',
+    path: 'packages/react/build/esm/index.mjs',
     import: '{ init, browserTracingIntegration, Replay }',
     gzip: true,
     limit: '75 KB',
   },
   {
     name: '@sentry/react - Webpack (gzipped)',
-    path: 'packages/react/build/esm/index.js',
+    path: 'packages/react/build/esm/index.mjs',
     import: '{ init }',
     gzip: true,
     limit: '30 KB',
   },
 
   // Next.js
+  // We ignore next/router and next/constants because they break size-limit calculation
+  // with new *.mjs bundles in v8
   {
     name: '@sentry/nextjs Client (incl. Tracing, Replay) - Webpack (gzipped)',
-    path: 'packages/nextjs/build/esm/client/index.js',
+    path: 'packages/nextjs/build/esm/client/index.mjs',
     import: '{ init, browserTracingIntegration, Replay }',
+    ignore: ['next/router', 'next/constants'],
     gzip: true,
     limit: '110 KB',
   },
   {
     name: '@sentry/nextjs Client - Webpack (gzipped)',
-    path: 'packages/nextjs/build/esm/client/index.js',
+    path: 'packages/nextjs/build/esm/client/index.mjs',
     import: '{ init }',
+    ignore: ['next/router', 'next/constants'],
     gzip: true,
     limit: '57 KB',
   },
+
+  // Feedback
   {
     name: '@sentry-internal/feedback - Webpack (gzipped)',
-    path: 'packages/feedback/build/npm/esm/index.js',
+    path: 'packages/feedback/build/npm/esm/index.mjs',
     import: '{ Feedback }',
     gzip: true,
     limit: '25 KB',
diff --git a/dev-packages/rollup-utils/npmHelpers.mjs b/dev-packages/rollup-utils/npmHelpers.mjs
index 6085a502200f..3e2c98401a6f 100644
--- a/dev-packages/rollup-utils/npmHelpers.mjs
+++ b/dev-packages/rollup-utils/npmHelpers.mjs
@@ -117,11 +117,20 @@ export function makeBaseNPMConfig(options = {}) {
   });
 }
 
-export function makeNPMConfigVariants(baseConfig) {
+export function makeNPMConfigVariants(baseConfig, options = {}) {
+  const { emitMjs = true, entryFileNameWithoutExtension = '[name]' } = options;
   const variantSpecificConfigs = [
     { output: { format: 'cjs', dir: path.join(baseConfig.output.dir, 'cjs') } },
     { output: { format: 'esm', dir: path.join(baseConfig.output.dir, 'esm') } },
   ];
 
+  if (emitMjs) {
+    variantSpecificConfigs[1].output.entryFileNames = `${entryFileNameWithoutExtension}.mjs`;
+  }
+
+  if (entryFileNameWithoutExtension !== '[name]') {
+    variantSpecificConfigs[0].output.entryFileNames = `${entryFileNameWithoutExtension}.js`;
+  }
+
   return variantSpecificConfigs.map(variant => deepMerge(baseConfig, variant));
 }
diff --git a/packages/astro/package.json b/packages/astro/package.json
index d7593bab3ffe..e664d346059d 100644
--- a/packages/astro/package.json
+++ b/packages/astro/package.json
@@ -24,20 +24,20 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.client.js",
-  "module": "build/esm/index.server.js",
-  "browser": "build/esm/index.client.js",
+  "module": "build/esm/index.server.mjs",
+  "browser": "build/esm/index.client.mjs",
   "types": "build/types/index.types.d.ts",
   "exports": {
     ".": {
-      "node": "./build/esm/index.server.js",
-      "browser": "./build/esm/index.client.js",
-      "import": "./build/esm/index.client.js",
+      "node": "./build/esm/index.server.mjs",
+      "browser": "./build/esm/index.client.mjs",
+      "import": "./build/esm/index.client.mjs",
       "require": "./build/cjs/index.server.js",
       "types": "./build/types/index.types.d.ts"
     },
     "./middleware": {
-      "node": "./build/esm/integration/middleware/index.js",
-      "import": "./build/esm/integration/middleware/index.js",
+      "node": "./build/esm/integration/middleware/index.mjs",
+      "import": "./build/esm/integration/middleware/index.mjs",
       "require": "./build/cjs/integration/middleware/index.js",
       "types": "./build/types/integration/middleware/index.types.d.ts"
     }
diff --git a/packages/browser/package.json b/packages/browser/package.json
index 3d2cb0a25e37..9337bd4d5dd1 100644
--- a/packages/browser/package.json
+++ b/packages/browser/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/npm/cjs/index.js",
-  "module": "build/npm/esm/index.js",
+  "module": "build/npm/esm/index.mjs",
   "types": "build/npm/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/npm.types/index.d.ts",
+        "default": "./build/npm/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/bun/package.json b/packages/bun/package.json
index f73ad938beed..6533e2737964 100644
--- a/packages/bun/package.json
+++ b/packages/bun/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/esm/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/core/package.json b/packages/core/package.json
index b971b1e00beb..14ff3df2dd33 100644
--- a/packages/core/package.json
+++ b/packages/core/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/deno/package.json b/packages/deno/package.json
index 21d76bbed255..cfbd5df68611 100644
--- a/packages/deno/package.json
+++ b/packages/deno/package.json
@@ -8,6 +8,15 @@
   "license": "MIT",
   "module": "build/index.mjs",
   "types": "build/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/index.d.ts",
+        "default": "./build/index.mjs"
+      }
+    }
+  },
   "publishConfig": {
     "access": "public"
   },
diff --git a/packages/feedback/package.json b/packages/feedback/package.json
index 3ae1af389b07..12cc2a4a5cf2 100644
--- a/packages/feedback/package.json
+++ b/packages/feedback/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/npm/cjs/index.js",
-  "module": "build/npm/esm/index.js",
+  "module": "build/npm/esm/index.mjs",
   "types": "build/npm/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/gatsby/package.json b/packages/gatsby/package.json
index 0fbebcc90f4e..d2d6b4841be9 100644
--- a/packages/gatsby/package.json
+++ b/packages/gatsby/package.json
@@ -24,8 +24,21 @@
     "gatsby-node.d.ts"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/integration-shims/package.json b/packages/integration-shims/package.json
index c19d6f8f3fe7..b454ea1d6ba3 100644
--- a/packages/integration-shims/package.json
+++ b/packages/integration-shims/package.json
@@ -3,8 +3,21 @@
   "version": "8.0.0-alpha.0",
   "description": "Shims for integrations in Sentry SDK.",
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/nextjs/package.json b/packages/nextjs/package.json
index 1fae1de57adf..741e47974572 100644
--- a/packages/nextjs/package.json
+++ b/packages/nextjs/package.json
@@ -10,9 +10,20 @@
     "node": ">=14.8"
   },
   "main": "build/cjs/index.server.js",
-  "module": "build/esm/index.server.js",
-  "browser": "build/esm/index.client.js",
+  "module": "build/esm/index.server.mjs",
+  "browser": "build/esm/index.client.mjs",
   "types": "build/types/index.types.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "browser": {
+        "import": "./build/esm/index.client.mjs",
+        "require": "./build/cjs/index.client.js"
+      },
+      "node": "./build/cjs/index.server.js",
+      "types": "./build/types/index.types.d.ts"
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/nextjs/rollup.npm.config.mjs b/packages/nextjs/rollup.npm.config.mjs
index 39b79c9593b2..82d76504ccf1 100644
--- a/packages/nextjs/rollup.npm.config.mjs
+++ b/packages/nextjs/rollup.npm.config.mjs
@@ -35,9 +35,6 @@ export default [
 
       packageSpecificConfig: {
         output: {
-          // Preserve the original file structure (i.e., so that everything is still relative to `src`)
-          entryFileNames: 'config/templates/[name].js',
-
           // this is going to be add-on code, so it doesn't need the trappings of a full module (and in fact actively
           // shouldn't have them, lest they muck with the module to which we're adding it)
           sourcemap: false,
@@ -55,6 +52,8 @@ export default [
         ],
       },
     }),
+    // Preserve the original file structure (i.e., so that everything is still relative to `src`)
+    { entryFileNameWithoutExtension: 'config/templates/[name]' },
   ),
   ...makeNPMConfigVariants(
     makeBaseNPMConfig({
@@ -62,14 +61,13 @@ export default [
 
       packageSpecificConfig: {
         output: {
-          // Preserve the original file structure (i.e., so that everything is still relative to `src`)
-          entryFileNames: 'config/loaders/[name].js',
-
           // make it so Rollup calms down about the fact that we're combining default and named exports
           exports: 'named',
         },
         external: ['@rollup/plugin-commonjs', 'rollup'],
       },
     }),
+    // Preserve the original file structure (i.e., so that everything is still relative to `src`)
+    { entryFileNameWithoutExtension: 'config/loaders/[name]' },
   ),
 ];
diff --git a/packages/nextjs/src/client/index.ts b/packages/nextjs/src/client/index.ts
index fd155705a885..157e2cf70560 100644
--- a/packages/nextjs/src/client/index.ts
+++ b/packages/nextjs/src/client/index.ts
@@ -2,6 +2,7 @@ import { addEventProcessor, applySdkMetadata, hasTracingEnabled, setTag } from '
 import type { BrowserOptions } from '@sentry/react';
 import { getDefaultIntegrations as getReactDefaultIntegrations, init as reactInit } from '@sentry/react';
 import type { EventProcessor, Integration } from '@sentry/types';
+import { GLOBAL_OBJ } from '@sentry/utils';
 
 import { devErrorSymbolicationEventProcessor } from '../common/devErrorSymbolicationEventProcessor';
 import { getVercelEnv } from '../common/getVercelEnv';
@@ -13,7 +14,7 @@ export * from '@sentry/react';
 
 export { captureUnderscoreErrorException } from '../common/_error';
 
-const globalWithInjectedValues = global as typeof global & {
+const globalWithInjectedValues = GLOBAL_OBJ as typeof GLOBAL_OBJ & {
   __rewriteFramesAssetPrefixPath__: string;
 };
 
diff --git a/packages/nextjs/src/client/tunnelRoute.ts b/packages/nextjs/src/client/tunnelRoute.ts
index 6ac5fb50a640..236b49e0e868 100644
--- a/packages/nextjs/src/client/tunnelRoute.ts
+++ b/packages/nextjs/src/client/tunnelRoute.ts
@@ -1,9 +1,9 @@
 import type { BrowserOptions } from '@sentry/react';
-import { dsnFromString, logger } from '@sentry/utils';
+import { GLOBAL_OBJ, dsnFromString, logger } from '@sentry/utils';
 
 import { DEBUG_BUILD } from '../common/debug-build';
 
-const globalWithInjectedValues = global as typeof global & {
+const globalWithInjectedValues = GLOBAL_OBJ as typeof GLOBAL_OBJ & {
   __sentryRewritesTunnelPath__?: string;
 };
 
diff --git a/packages/nextjs/src/config/loaders/wrappingLoader.ts b/packages/nextjs/src/config/loaders/wrappingLoader.ts
index dab8c767c54f..e0af166c17ed 100644
--- a/packages/nextjs/src/config/loaders/wrappingLoader.ts
+++ b/packages/nextjs/src/config/loaders/wrappingLoader.ts
@@ -15,29 +15,29 @@ const SENTRY_WRAPPER_MODULE_NAME = 'sentry-wrapper-module';
 // Needs to end in .cjs in order for the `commonjs` plugin to pick it up
 const WRAPPING_TARGET_MODULE_NAME = '__SENTRY_WRAPPING_TARGET_FILE__.cjs';
 
-const apiWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'apiWrapperTemplate.js');
+const apiWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'apiWrapperTemplate.mjs');
 const apiWrapperTemplateCode = fs.readFileSync(apiWrapperTemplatePath, { encoding: 'utf8' });
 
-const pageWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'pageWrapperTemplate.js');
+const pageWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'pageWrapperTemplate.mjs');
 const pageWrapperTemplateCode = fs.readFileSync(pageWrapperTemplatePath, { encoding: 'utf8' });
 
-const middlewareWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'middlewareWrapperTemplate.js');
+const middlewareWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'middlewareWrapperTemplate.mjs');
 const middlewareWrapperTemplateCode = fs.readFileSync(middlewareWrapperTemplatePath, { encoding: 'utf8' });
 
 let showedMissingAsyncStorageModuleWarning = false;
 
-const sentryInitWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'sentryInitWrapperTemplate.js');
+const sentryInitWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'sentryInitWrapperTemplate.mjs');
 const sentryInitWrapperTemplateCode = fs.readFileSync(sentryInitWrapperTemplatePath, { encoding: 'utf8' });
 
 const serverComponentWrapperTemplatePath = path.resolve(
   __dirname,
   '..',
   'templates',
-  'serverComponentWrapperTemplate.js',
+  'serverComponentWrapperTemplate.mjs',
 );
 const serverComponentWrapperTemplateCode = fs.readFileSync(serverComponentWrapperTemplatePath, { encoding: 'utf8' });
 
-const routeHandlerWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'routeHandlerWrapperTemplate.js');
+const routeHandlerWrapperTemplatePath = path.resolve(__dirname, '..', 'templates', 'routeHandlerWrapperTemplate.mjs');
 const routeHandlerWrapperTemplateCode = fs.readFileSync(routeHandlerWrapperTemplatePath, { encoding: 'utf8' });
 
 export type WrappingLoaderOptions = {
diff --git a/packages/nextjs/src/config/webpack.ts b/packages/nextjs/src/config/webpack.ts
index a6555c3b3343..1c15c84e4ee4 100644
--- a/packages/nextjs/src/config/webpack.ts
+++ b/packages/nextjs/src/config/webpack.ts
@@ -42,6 +42,12 @@ let showedHiddenSourceMapsWarningMsg = false;
 let showedMissingCliBinaryWarningMsg = false;
 let showedMissingGlobalErrorWarningMsg = false;
 
+const ext = typeof require === 'undefined' ? 'mjs' : 'js';
+
+const sdkMultiplexerLoader = path.resolve(__dirname, 'loaders', `sdkMultiplexerLoader.${ext}`);
+const wrappingLoader = path.resolve(__dirname, 'loaders', `wrappingLoader.${ext}`);
+const valueInjectionLoader = path.resolve(__dirname, 'loaders', `valueInjectionLoader.${ext}`);
+
 // TODO: merge default SentryWebpackPlugin ignore with their SentryWebpackPlugin ignore or ignoreFile
 // TODO: merge default SentryWebpackPlugin include with their SentryWebpackPlugin include
 // TODO: drop merged keys from override check? `includeDefaults` option?
@@ -92,7 +98,7 @@ export function constructWebpackConfigFunction(
       test: /node_modules[/\\]@sentry[/\\]nextjs/,
       use: [
         {
-          loader: path.resolve(__dirname, 'loaders', 'sdkMultiplexerLoader.js'),
+          loader: sdkMultiplexerLoader,
           options: {
             importTarget: RUNTIME_TO_SDK_ENTRYPOINT_MAP[runtime],
           },
@@ -210,7 +216,7 @@ export function constructWebpackConfigFunction(
         test: isPageResource,
         use: [
           {
-            loader: path.resolve(__dirname, 'loaders', 'wrappingLoader.js'),
+            loader: wrappingLoader,
             options: {
               ...staticWrappingLoaderOptions,
               wrappingTargetKind: 'page',
@@ -248,7 +254,7 @@ export function constructWebpackConfigFunction(
         test: isApiRouteResource,
         use: [
           {
-            loader: path.resolve(__dirname, 'loaders', 'wrappingLoader.js'),
+            loader: wrappingLoader,
             options: {
               ...staticWrappingLoaderOptions,
               vercelCronsConfig,
@@ -264,7 +270,7 @@ export function constructWebpackConfigFunction(
           test: isMiddlewareResource,
           use: [
             {
-              loader: path.resolve(__dirname, 'loaders', 'wrappingLoader.js'),
+              loader: wrappingLoader,
               options: {
                 ...staticWrappingLoaderOptions,
                 wrappingTargetKind: 'middleware',
@@ -281,7 +287,7 @@ export function constructWebpackConfigFunction(
         test: isServerComponentResource,
         use: [
           {
-            loader: path.resolve(__dirname, 'loaders', 'wrappingLoader.js'),
+            loader: wrappingLoader,
             options: {
               ...staticWrappingLoaderOptions,
               wrappingTargetKind: 'server-component',
@@ -295,7 +301,7 @@ export function constructWebpackConfigFunction(
         test: isRouteHandlerResource,
         use: [
           {
-            loader: path.resolve(__dirname, 'loaders', 'wrappingLoader.js'),
+            loader: wrappingLoader,
             options: {
               ...staticWrappingLoaderOptions,
               wrappingTargetKind: 'route-handler',
@@ -319,7 +325,7 @@ export function constructWebpackConfigFunction(
         },
         use: [
           {
-            loader: path.resolve(__dirname, 'loaders', 'wrappingLoader.js'),
+            loader: wrappingLoader,
             options: {
               ...staticWrappingLoaderOptions,
               wrappingTargetKind: 'sentry-init',
@@ -1011,7 +1017,7 @@ function addValueInjectionLoader(
       test: /sentry\.(server|edge)\.config\.(jsx?|tsx?)/,
       use: [
         {
-          loader: path.resolve(__dirname, 'loaders/valueInjectionLoader.js'),
+          loader: valueInjectionLoader,
           options: {
             values: serverValues,
           },
@@ -1022,7 +1028,7 @@ function addValueInjectionLoader(
       test: /sentry\.client\.config\.(jsx?|tsx?)/,
       use: [
         {
-          loader: path.resolve(__dirname, 'loaders/valueInjectionLoader.js'),
+          loader: valueInjectionLoader,
           options: {
             values: clientValues,
           },
diff --git a/packages/nextjs/test/config/loaders.test.ts b/packages/nextjs/test/config/loaders.test.ts
index ed3589363539..ab4b3ae4c5e0 100644
--- a/packages/nextjs/test/config/loaders.test.ts
+++ b/packages/nextjs/test/config/loaders.test.ts
@@ -219,7 +219,7 @@ describe('webpack loaders', () => {
         if (expectedWrappingTargetKind) {
           expect(loaderApplications).toContainEqual(
             expect.objectContaining({
-              loader: expect.stringMatching(/wrappingLoader\.js$/),
+              loader: expect.stringMatching(/wrappingLoader\.m?js$/),
               options: expect.objectContaining({
                 wrappingTargetKind: expectedWrappingTargetKind,
               }),
@@ -228,7 +228,7 @@ describe('webpack loaders', () => {
         } else {
           expect(loaderApplications).not.toContainEqual(
             expect.objectContaining({
-              loader: expect.stringMatching(/wrappingLoader\.js$/),
+              loader: expect.stringMatching(/wrappingLoader\.m?js$/),
             }),
           );
         }
diff --git a/packages/nextjs/test/config/wrappingLoader.test.ts b/packages/nextjs/test/config/wrappingLoader.test.ts
index eec179725e74..f271477e1432 100644
--- a/packages/nextjs/test/config/wrappingLoader.test.ts
+++ b/packages/nextjs/test/config/wrappingLoader.test.ts
@@ -4,44 +4,44 @@ import * as path from 'path';
 const originalReadfileSync = fs.readFileSync;
 
 jest.spyOn(fs, 'readFileSync').mockImplementation((filePath, options) => {
-  if (filePath.toString().endsWith('/config/templates/apiWrapperTemplate.js')) {
+  if (filePath.toString().endsWith('/config/templates/apiWrapperTemplate.mjs')) {
     return originalReadfileSync(
-      path.join(__dirname, '../../build/cjs/config/templates/apiWrapperTemplate.js'),
+      path.join(__dirname, '../../build/esm/config/templates/apiWrapperTemplate.mjs'),
       options,
     );
   }
 
-  if (filePath.toString().endsWith('/config/templates/pageWrapperTemplate.js')) {
+  if (filePath.toString().endsWith('/config/templates/pageWrapperTemplate.mjs')) {
     return originalReadfileSync(
-      path.join(__dirname, '../../build/cjs/config/templates/pageWrapperTemplate.js'),
+      path.join(__dirname, '../../build/esm/config/templates/pageWrapperTemplate.mjs'),
       options,
     );
   }
 
-  if (filePath.toString().endsWith('/config/templates/middlewareWrapperTemplate.js')) {
+  if (filePath.toString().endsWith('/config/templates/middlewareWrapperTemplate.mjs')) {
     return originalReadfileSync(
-      path.join(__dirname, '../../build/cjs/config/templates/middlewareWrapperTemplate.js'),
+      path.join(__dirname, '../../build/esm/config/templates/middlewareWrapperTemplate.mjs'),
       options,
     );
   }
 
-  if (filePath.toString().endsWith('/config/templates/sentryInitWrapperTemplate.js')) {
+  if (filePath.toString().endsWith('/config/templates/sentryInitWrapperTemplate.mjs')) {
     return originalReadfileSync(
-      path.join(__dirname, '../../build/cjs/config/templates/sentryInitWrapperTemplate.js'),
+      path.join(__dirname, '../../build/esm/config/templates/sentryInitWrapperTemplate.mjs'),
       options,
     );
   }
 
-  if (filePath.toString().endsWith('/config/templates/serverComponentWrapperTemplate.js')) {
+  if (filePath.toString().endsWith('/config/templates/serverComponentWrapperTemplate.mjs')) {
     return originalReadfileSync(
-      path.join(__dirname, '../../build/cjs/config/templates/serverComponentWrapperTemplate.js'),
+      path.join(__dirname, '../../build/esm/config/templates/serverComponentWrapperTemplate.mjs'),
       options,
     );
   }
 
-  if (filePath.toString().endsWith('/config/templates/routeHandlerWrapperTemplate.js')) {
+  if (filePath.toString().endsWith('/config/templates/routeHandlerWrapperTemplate.mjs')) {
     return originalReadfileSync(
-      path.join(__dirname, '../../build/cjs/config/templates/routeHandlerWrapperTemplate.js'),
+      path.join(__dirname, '../../build/esm/config/templates/routeHandlerWrapperTemplate.mjs'),
       options,
     );
   }
diff --git a/packages/node-experimental/package.json b/packages/node-experimental/package.json
index 1d1f50a6bf42..ed710f1be715 100644
--- a/packages/node-experimental/package.json
+++ b/packages/node-experimental/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/node-experimental/rollup.anr-worker.config.mjs b/packages/node-experimental/rollup.anr-worker.config.mjs
index 9887342c63fd..d7499b194efa 100644
--- a/packages/node-experimental/rollup.anr-worker.config.mjs
+++ b/packages/node-experimental/rollup.anr-worker.config.mjs
@@ -6,7 +6,7 @@ function createAnrWorkerConfig(destDir, esm) {
     entrypoints: ['src/integrations/anr/worker.ts'],
     jsVersion: 'es6',
     licenseTitle: '@sentry/node',
-    outputFileBase: () => 'worker-script.js',
+    outputFileBase: () => (esm ? 'worker-script.mjs' : 'worker-script.js'),
     packageSpecificConfig: {
       output: {
         dir: destDir,
diff --git a/packages/node-experimental/src/integrations/modules.ts b/packages/node-experimental/src/integrations/modules.ts
index ad30bb4d7a3b..244fb9c1d500 100644
--- a/packages/node-experimental/src/integrations/modules.ts
+++ b/packages/node-experimental/src/integrations/modules.ts
@@ -11,10 +11,13 @@ const _modulesIntegration = (() => {
   return {
     name: INTEGRATION_NAME,
     processEvent(event) {
-      event.modules = {
-        ...event.modules,
-        ..._getModules(),
-      };
+      // If we're running in ESM mode, we don't have access to require
+      if (typeof require !== 'undefined') {
+        event.modules = {
+          ...event.modules,
+          ..._getModules(),
+        };
+      }
 
       return event;
     },
diff --git a/packages/node-experimental/src/integrations/tracing/prisma.ts b/packages/node-experimental/src/integrations/tracing/prisma.ts
index 1f78262b9a3c..b104329aabc6 100644
--- a/packages/node-experimental/src/integrations/tracing/prisma.ts
+++ b/packages/node-experimental/src/integrations/tracing/prisma.ts
@@ -1,5 +1,6 @@
 import { registerInstrumentations } from '@opentelemetry/instrumentation';
-import { PrismaInstrumentation } from '@prisma/instrumentation';
+// This is a cjs module, so have to import like this
+import * as prismaInstrumentation from '@prisma/instrumentation';
 import { defineIntegration } from '@sentry/core';
 import type { IntegrationFn } from '@sentry/types';
 
@@ -10,7 +11,7 @@ const _prismaIntegration = (() => {
       registerInstrumentations({
         instrumentations: [
           // does not have a hook to adjust spans & add origin
-          new PrismaInstrumentation({}),
+          new prismaInstrumentation.PrismaInstrumentation({}),
         ],
       });
     },
diff --git a/packages/node-experimental/src/sdk/init.ts b/packages/node-experimental/src/sdk/init.ts
index 5e62a01de6cd..a383a41b6f78 100644
--- a/packages/node-experimental/src/sdk/init.ts
+++ b/packages/node-experimental/src/sdk/init.ts
@@ -28,7 +28,6 @@ import { contextLinesIntegration } from '../integrations/contextlines';
 import { httpIntegration } from '../integrations/http';
 import { localVariablesIntegration } from '../integrations/local-variables';
 import { modulesIntegration } from '../integrations/modules';
-import { nativeNodeFetchIntegration } from '../integrations/node-fetch';
 import { onUncaughtExceptionIntegration } from '../integrations/onuncaughtexception';
 import { onUnhandledRejectionIntegration } from '../integrations/onunhandledrejection';
 import { spotlightIntegration } from '../integrations/spotlight';
@@ -51,7 +50,6 @@ export function getDefaultIntegrations(options: Options): Integration[] {
     // Native Wrappers
     consoleIntegration(),
     httpIntegration(),
-    nativeNodeFetchIntegration(),
     // Global Handlers
     onUncaughtExceptionIntegration(),
     onUnhandledRejectionIntegration(),
@@ -61,7 +59,6 @@ export function getDefaultIntegrations(options: Options): Integration[] {
     nodeContextIntegration(),
     modulesIntegration(),
     httpIntegration(),
-    nativeNodeFetchIntegration(),
     ...(hasTracingEnabled(options) ? getAutoPerformanceIntegrations() : []),
   ];
 }
diff --git a/packages/node-experimental/tsconfig.json b/packages/node-experimental/tsconfig.json
index 5fc0658105eb..737a316bff40 100644
--- a/packages/node-experimental/tsconfig.json
+++ b/packages/node-experimental/tsconfig.json
@@ -4,6 +4,7 @@
   "include": ["src/**/*"],
 
   "compilerOptions": {
-    "lib": ["es6"]
+    "lib": ["es6"],
+    "module": "Node16"
   }
 }
diff --git a/packages/node/package.json b/packages/node/package.json
index 6fea8bd58a33..002a0eccb9a8 100644
--- a/packages/node/package.json
+++ b/packages/node/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/opentelemetry/package.json b/packages/opentelemetry/package.json
index 3fc72e5945ee..f0e13f0a40b2 100644
--- a/packages/opentelemetry/package.json
+++ b/packages/opentelemetry/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/profiling-node/package.json b/packages/profiling-node/package.json
index 7dd1b473f215..c65ff3d4bfd0 100644
--- a/packages/profiling-node/package.json
+++ b/packages/profiling-node/package.json
@@ -8,6 +8,15 @@
   "license": "MIT",
   "main": "lib/index.js",
   "types": "lib/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "require": {
+        "types": "./lib/types/index.d.ts",
+        "default": "./lib/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "lib/types/index.d.ts": [
diff --git a/packages/react/package.json b/packages/react/package.json
index 038a3066acaf..f1246d55a82e 100644
--- a/packages/react/package.json
+++ b/packages/react/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/remix/package.json b/packages/remix/package.json
index b5bd70796199..c170cf07de6a 100644
--- a/packages/remix/package.json
+++ b/packages/remix/package.json
@@ -20,9 +20,20 @@
     "scripts"
   ],
   "main": "build/cjs/index.server.js",
-  "module": "build/esm/index.server.js",
-  "browser": "build/esm/index.client.js",
+  "module": "build/esm/index.server.mjs",
+  "browser": "build/esm/index.client.mjs",
   "types": "build/types/index.types.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "browser": {
+        "import": "./build/esm/index.client.mjs",
+        "require": "./build/cjs/index.client.js"
+      },
+      "node": "./build/cjs/index.server.js",
+      "types": "./build/types/index.types.d.ts"
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/replay-canvas/package.json b/packages/replay-canvas/package.json
index 59f3b173a944..1335c072634a 100644
--- a/packages/replay-canvas/package.json
+++ b/packages/replay-canvas/package.json
@@ -3,8 +3,21 @@
   "version": "8.0.0-alpha.0",
   "description": "Replay canvas integration",
   "main": "build/npm/cjs/index.js",
-  "module": "build/npm/esm/index.js",
+  "module": "build/npm/esm/index.mjs",
   "types": "build/npm/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/replay/package.json b/packages/replay/package.json
index a2f3778c755d..909088bd275f 100644
--- a/packages/replay/package.json
+++ b/packages/replay/package.json
@@ -3,8 +3,21 @@
   "version": "8.0.0-alpha.0",
   "description": "User replays for Sentry",
   "main": "build/npm/cjs/index.js",
-  "module": "build/npm/esm/index.js",
+  "module": "build/npm/esm/index.mjs",
   "types": "build/npm/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/serverless/package.json b/packages/serverless/package.json
index 9ff74a146de6..2aa2cecc2957 100644
--- a/packages/serverless/package.json
+++ b/packages/serverless/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/npm/cjs/index.js",
-  "module": "build/npm/esm/index.js",
+  "module": "build/npm/esm/index.mjs",
   "types": "build/npm/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [
diff --git a/packages/svelte/package.json b/packages/svelte/package.json
index 763b34455389..66988e8f899a 100644
--- a/packages/svelte/package.json
+++ b/packages/svelte/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/sveltekit/package.json b/packages/sveltekit/package.json
index f66be7f60182..d068f5d9559b 100644
--- a/packages/sveltekit/package.json
+++ b/packages/sveltekit/package.json
@@ -23,7 +23,7 @@
     "./package.json": "./package.json",
     ".": {
       "browser": {
-        "import": "./build/esm/index.client.js",
+        "import": "./build/esm/index.client.mjs",
         "require": "./build/cjs/index.client.js"
       },
       "node": "./build/cjs/index.server.js",
diff --git a/packages/tracing-internal/package.json b/packages/tracing-internal/package.json
index c84fb372a916..6c5411d1bd0e 100644
--- a/packages/tracing-internal/package.json
+++ b/packages/tracing-internal/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/types/package.json b/packages/types/package.json
index 3f45a55d3eed..6735e000b4c3 100644
--- a/packages/types/package.json
+++ b/packages/types/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/utils/package.json b/packages/utils/package.json
index d3420d8527d3..16a5f02dc1a5 100644
--- a/packages/utils/package.json
+++ b/packages/utils/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/vercel-edge/package.json b/packages/vercel-edge/package.json
index 248122931e8a..729b7497549f 100644
--- a/packages/vercel-edge/package.json
+++ b/packages/vercel-edge/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/vue/package.json b/packages/vue/package.json
index d04720683906..9af442e88cb1 100644
--- a/packages/vue/package.json
+++ b/packages/vue/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/cjs/index.js",
-  "module": "build/esm/index.js",
+  "module": "build/esm/index.mjs",
   "types": "build/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/types/index.d.ts",
+        "default": "./build/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/types/index.d.ts": [
diff --git a/packages/wasm/package.json b/packages/wasm/package.json
index cdea694c40d6..0cb3754f1ba0 100644
--- a/packages/wasm/package.json
+++ b/packages/wasm/package.json
@@ -16,8 +16,21 @@
     "types-ts3.8"
   ],
   "main": "build/npm/cjs/index.js",
-  "module": "build/npm/esm/index.js",
+  "module": "build/npm/esm/index.mjs",
   "types": "build/npm/types/index.d.ts",
+  "exports": {
+    "./package.json": "./package.json",
+    ".": {
+      "import": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/esm/index.mjs"
+      },
+      "require": {
+        "types": "./build/npm/types/index.d.ts",
+        "default": "./build/npm/cjs/index.js"
+      }
+    }
+  },
   "typesVersions": {
     "<4.9": {
       "build/npm/types/index.d.ts": [